EM3

A dedicated, automated, timesaving, and user-friendly system that enables a total solution for TEM/STEM and SEM sample preparation for both cross-section and plan view in a wide range of applications. Featuring a cryo-cooled dry saw process, the EM3 system prepares specimens of either crystalline or amorphous materials. The output sample is mounted onto a compatible stub that allows rework.

Features

• Flexible cryo-cooled dry saw process
• Supports crystalline and amorphous materials
• Plan view and side view preparation
• 300mm stage allowing full wafer inspection and marking (target designation)
• Whole-wafer navigation capability
• High magnification optical microscope
• Active vibration isolated table

Benefits

• Applicable for site-specific and general area features
• Interfaces with broad ion milling
• Increases overall throughput
• Improves yield analysis
• Improves characterization
• Improves and enhances SEM & FIB utilization
• Low cost of ownership (COO)
• Enables multiple reworks of TEM specimen